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| MS761 PRESSURE SENSOR DIE (0-1 BAR) * 0 to 100 kPa bar range (1 bar or 14.5 PSI) * High Sensitivity * ROHS-Compatible & Pb-free1 DESCRIPTION The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor. FEATURES * * * Uncompensated pressure sensor die High Sensitivity: Output Span 240 mV @ 5V Temperature Range -40 ...+ 125 C C * * * Linearity 0.15 % (typical) Small Die Size 2.00 X 1.86 mm Low cost, High reliability APPLICATION * * * For high resolution absolute sensor systems Engine Controls Barometers, Altimeters, Variometers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out+ OutOut- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground GND1 1 GND2 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE). DA761_002.doc 00000761348 ENC922 May 9, 2007 1/4 PAD OUT Vs+ Epi OutImportant remarks: MS761 As the sensing elements are diffused resistances, the voltage applied on the ground pads (GND1 and GND2) has to be lower than the voltage applied on supply voltage pad (Vs+). The epitaxial layer is connected to the Vs+ pin on the die Out+ GND1 GND2 LAYOUT MS761A MS761D Bondable area = 100 x 100 um Bondable area = 100 x 100 um DA761_002.doc 00000761348 ENC922 May 9, 2007 2/4 FULL SCALE PRESSURE kPa 100 bar 1 mbar 1000 PSI 14.5 atm 0.987 mm Hg 750 m H2O 10.197 Inches H2O 401 ABSOLUTE MAXIMUM RATINGS Parameter Supply voltage Storage temperature Pressure overload Symbol VS+ TS Ta = 25 C -40 o Conditions Min Max 20 +125 5 Unit V C Bar o ELECTRICAL CHARACTERISTICS (Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25 ) C Parameter Operating Pressure Range Operating Temperature Range Bridge Resistance Full-scale span (FS) Zero Pressure Offset Linearity Temperature Coefficient of Resistance Span Offset Pressure Hysteresis Repeatability Temperature Hysteresis Min 0 -40 3.0 190 -40 Typ - Max 1 125 Unit Bar C k mV mV % FS ppm/ C ppm/ C V/ C % FS % FS % FS 1 2 Notes 3.4 240 0 0.15 3.8 290 40 0.4 + 3300 - 2300 + 100 0.15 0.15 0.3 + 2400 - 1500 - 100 + 2800 - 1900 0.05 0.05 3 4 5 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 1 bar). 2) Slope of the endpoint straight line from 25 to 60 C C. 3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25 C. 4) Same as 3) after 10 pressure cycles 5) Maximum difference in offset after one thermal cycle from -40 to +125 C C. DA761_002.doc 00000761348 ENC922 May 9, 2007 3/4 PICKING TOOLS The MS761 sensors have a sensitive membrane (0.9 x 0.9 mm) the sensor dice outer diameter is: 1.93 x 1.76 mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97 Shore A). Its external size must fit the sensor and the vacuum cavity must be as large as the membrane itself. Successful test where done with some tools of SPT, see SPT drawing and references bellow). SPT references External dimension Internal dimensions RTR-A1-060x060 TL & TW: 0.06 inch /1.52 mm H: 0.035 inch / 0.89 mm CTR-A1-080 F: 0.08 inch / 2.03 mm H: 0.035 inch / 0.89 mm ORDERING INFORMATION Product Code MS761-A MS761-A_0.2 MS761-D Type Absolute Absolute Differential Product 1 bar Pressure Sensor Die sawn on b/f 1 bar Pressure Sensor Die 0.2 mm Pyrex sawn on b/f 1 bar Pressure Sensor Die sawn on b/f Art.-Nr. 76125021 76125022 76125121 The MS761 dice are supplied sawn on blue foil, mounted on plastic rings FACTORY CONTACTS Intersema Sensoric SA Ch. Chapons-des-Pres 11 CH-2022 BEVAIX SWITZERLAND Tel. (032) 847 9550 Tel. Int. +41 32 847 9550 Telefax +41 32 847 9569 e-mail: http://www.intersema.ch NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification. DA761_002.doc 00000761348 ENC922 May 9, 2007 4/4 |
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